H. Shih, S. Wu, T. Huang, D. Outka, L. Jiang, Y. Fang, J. Daugherty, S. Ramanathan, S. Li, O. Leonte, Y. Du, C. Zhou, C. Chang, LAM Research, Fremont, CA
A systematic study of thermal spray Y2O3 coating has been carried out. The study has included the following techniques:
Coating thickness, coating surface roughness (Ra), coating color and color uniformity, coating breakdown voltage, coating admittance in mS, corrosion resistance of coating in HCl solution, corrosion resistance of coating in electrochemical impedance spectroscopy (EIS) measurements, coating interface model in EIS measurements, coating bonding test through bending test, coating bonding strength through pulling test, coating surface observation under microscope, and coating wet cleaning compatibility.
All the above studies have helped us to have a better understanding of Y2O3 thermal spray coatings and its application in semiconductor industry.
