The Use of Micro-X-Ray Fluorescence in a Scanning Electron Microscope for Failure Analysis of Aerospace Materials

Abstract Title: The Use of Micro-X-ray Fluorescence in a Scanning Electron
Microscope for Failure Analysis of Aerospace Materials

Authors: Daniel DeMiglio

Speaker: Daniel DeMiglio

Abstract: Micro X-ray fluorescence spectroscopy (micro-XRF) is a relatively new failure analysis tool.  An X-ray gun with focusing capillary fiber optics interfaced with a scanning electron microscope (SEM) is used for semi-quantitative XRF microanalysis by energy dispersive X-ray spectroscopy (EDS).  This paper will present a brief overview of how micro-XRF EDS can be a useful complementary microanalysis technique with electron beam EDS to obtain a more complete understanding of chemical composition in critical areas on a sample surface or where the volume of sample material is too small for conventional bulk chemical analysis. Some advantages to using micro-XRF include: higher X-ray peak to background ratios and greater beam stability for increased accuracy with standards as well as greater sensitivity for higher atomic number elements.  Micro-XRF is well-suited to identification of non-ferrous materials and highly alloyed ferrous alloys. Examples will be presented of how micro-XRF and electron beam EDS have been applied to investigations involving alloy identification, contamination and wear particle analysis.