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Tuesday, August 3, 2004 - 2:10 PM
SES 12.2

Magnetron Sputtered nc-TiC/a-C Nanocomposite Coatings: Processing, Characterization and Properties

D. Galvan, Y. T. Pei, J. T. M. De Hosson, University of Groningen, Groningen, Netherlands

Balanced and unbalanced magnetron sputtering was employed to deposit nc-TiC/a-C nanocomposite coatings with hydrogenated or hydrogen-free matrix. EMPA and XPS determined the coatings particles volume fraction (VF). Nanoindentations and tribological tests found that the coatings exhibit a hardness (H) of 5~36 GPa, a Young’s modulus (E) of 55~335 GPa, an H/E ratio of 0.07~0.15 and a friction coefficient as low as 0.06. TEM observations and energy-filtered TEM together with EELS were employed to characterize the coating nanostructure (particle size, distribution, C sp3/sp2 ratio). The coatings nanostructure was manipulated during deposition by changing deposition pressure, applied bias and chamber magnetic environment, allowing, for instance, a variation in size of the TiC particles between 2 and 20 nm that affects the coating properties. The influence of the hydrogen content on the coatings performance has been inspected because of the thermal stability of the coating.


Summary: Magnetron sputtering was employed to deposit nc-TiC/a-C nanocomposite coatings. The coating nanostructures were characterized with TEM, and were related to the mechanical performance. Mechanical tests revealed hardness/E-modulus ratios of 0.07~0.15, friction coefficient of 0.06 and determined the influence of the hydrogen content on the thermal stability of the coating.