Selective etching of carbide-based materials and coatings by certain halogen gases (such as chlorine) at elevated temperatures results in a nano-structured carbon film that we call nanotstrucutred carbide derived carbon (CDC). In their nano-structure, these films conists of nanocrystalline diamond, graphite, nano-onions and amorphous carbon. Owing to their unique structure and mechanical properties, these films provide very low friction and wear coefficients to sliding tribological interfaces. In this talk, we will present the results of a systematic study on the friction and wear behavior of these films and also elaborate on the fundamental mechanisms that control their tribological behavior.