M. Ürgen, Istanbul Technical University, Istanbul, Turkey
This study mainly aims to produce MeN-X (MeN, transition metal nitride, X metals such as Cu and Ag) type nanocomposite hard coatings by hybrid PVD techniques based on cathodic arc PVD (CAPVD). The most widely used PVD technique for the production of these structures is magnetron sputtering. Other widely accepted technique for production of metal nitrides, CAPVD, is not suitable for these type of nanocomposite coatings because of the excessive droplet formation during evaporation of the low melting temperature metals. In this study the low melting point metal vapor is achieved by thermal evaporation or magnetron sputtering and then injected into CA plasma of the transition metal. The Mo-N-X type coatings produced by magnetron sputtering and hybrid CAPVD based systems are characterized giving special emphasis to their tribological properties. A comparison of the properties of the films produced with magnetron sputtering and arc based hybrid techniques are given.
Summary: This study aims the production of MeN-X (MeN, transition metal nitride, X, metals such as copper, silver) type nanocomposite hard coatings by hybrid PVD techniques based on cathodic arc PVD and characterize them giving emphasis to the comparison of their tribological properties with similar films produced with magnetron sputtering.