Hybrid deposition techniques facilitate a high degree of structural control, permitting growth of nanostructured materials, which are not possible to produce by other methods. In particular, Physical Vapor Deposition (PVD) allows a low temperature growth of nanostructured materials by mixing plasma streams from various sources. Several examples of hybrid PVD methods are discussed for the growth of wear protective nanocomposite coatings. One was a hybrid of laser ablation and ion beam deposition, which was used for development Al2O3/MoS2 nanocomposites. Another was a combination of laser ablation with magnetron sputtering (MSPLD), where highly energetic carbon plasma from laser ablation was intersected with a magnetron-generated plasma containing sputtered metal atoms. MSPLD was used to prepare many nanostructured coatings, including WC/DLC, WC/DLC/WS2, YSZ/Au, and YSZ/Au/MoS2/DLC nano-composites for wear protection of engineering components. Recently, we initiated exploration of hybrid processes, using filtered vacuum arc plasma, laser ablation and magnetron sputtering for fullerene-like materials synthesis.