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Tuesday, August 3, 2004
SES 17.5

Growth and Characterization of N-doped Polycrystalline Diamond Films on the Surface of Biomaterials

W. Ahmed, M. J. Jackson, Purdue University, West Lafayette, IN; A. Afzal, A. N. Jones, C. A. Rego, Manchester Metropolitan University, Manchester, United Kingdom

For microelectromechanical (MEMS) devices, biosurfaces, and optical components it is highly desirable to deposit ultra smooth diamond films on silicon substrates. The effects of nitrogen doping on the nucleation, growth, crystalline and structure of the diamond films on {110} silicon substrates grown by hot filament chemical vapour deposition have been investigated. In this study we have found that the addition of approximately 200 ppm of nitrogen to the CH4/H2 mixture gives an optimum growth and structure, which is reproducible. Greater amounts of nitrogen addition profoundly affected the surface morphology and crystalline structure of the films. At higher levels there is seen a total breakdown in the crystallinity of the films. Diamond growth was performed using a hot-filament chemical vapour deposition (HFCVD) System. Scanning electron Microscopy (SEM), x-ray diffraction (XRD) and Raman spectroscopy were used to characterise the growth rate, surface morphology and crystal structure of the films.

Summary: For biosurfaces and optical components it is highly desirable to deposit ultra smooth diamond films on silicon substrates. The effects of nitrogen doping on the nucleation, growth, crystalline and structure of the diamond films on {110} substrates grown by hot filament chemical vapour deposition have been investigated.