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Tuesday, August 3, 2004
SES .4

Growth and Characterization of (100) and (111) textured Chemical Vapor Deposited Diamond Films

M. J. Jackson, G. M. Robinson, Purdue University, West Lafayette, IN; E. Titus, N. Ali, J. Gracio, University of Aveiro, Aveiro, Portugal; D. S. Misra, Indian Institute of Technology, Mumbai, India

Highly textured diamond films are essential for many of the applications. For example, (100) textured films are desirable for optical and tribological applications and (111) textured films are desirable for field emission application. We employ CVD to produce (100) and (111) textured diamond films. We have developed a new method, which involves applying a temperature-gradient across the substrate in order to obtain (100) textured films. In addition, we have produced (111) textured films on zeolite substrates. We describe the various conditions used for the growth of the thick self-supported diamond films and fabrication of optical windows. In order to understand the nature and origin of the defects and impurities several sets of samples were deposited with varying deposition pressure and CH4/H2 ratio. SEM, XRD and Raman spectroscopy was used to investigate the as-deposited films.

Summary: The IR results of(100) oriented sample show prominent CH2 related peaks where as the (111) oriented sample comprises multiple CH, CH2 and CH3 peaks. This may be due to the fact that the (100) growth of diamond proceeds via CH2 species.