(V) The STEM-in-SEM

Scanning electron microscopes and solid-state transmission electron detectors are widely available and generally easy to use, making the collection of imaging techniques referred to as Scanning Transmission Electron Microscopy in a Scanning Electron Microscope (STEM-in-SEM) more accessible today than ever before. These techniques are well suited to a host of transmission imaging applications including nanoparticle metrology, imaging beam-sensitive materials, grain texture studies, and defect analyses, for example. In this tutorial, we will describe how to obtain both qualitative and quantitative information from different transmission detectors including secondary electron conversion devices, different solid-state detectors, and a recently-developed programmable STEM (p-STEM) detector.