Method and Mechanism of Laser High Performance Manufacturing Carbon-based Transistors

As the silicon-based chip industry approaches its physical limits, carbon-based semiconductors are considered one of the disruptive technologies of the "post Moore era". Carbon nanotubes, with their excellent electrical properties, are expected to become interconnect materials for the next generation of large-scale integrated circuits. Due to challenges such as excessive channel size, irregular arrangement of carbon nanotubes, and high interface resistance between carbon nanotubes, there has been no qualitative breakthrough in the performance of carbon nanotube integrated circuits. The report will introduce the progress of laser micro nano manufacturing methods and mechanisms from the perspectives of nanochannel processing, regular self-assembly of carbon nanotubes, and controllable connection of carbon nanotubes.