Abstracts

Symposium

Chip Access/Delayering User Group

EDFAS General Membership Meeting

Focused Ion Beam (FIB) User Group

Nano Probe User Group

Scanning Optical Microscopy (SOM) User Group

Scanning Probe Microscopy (SPM) User Group

Session 1: Advanced Techniques 1

SYMP051.2

Diffractive Lenses for High Resolution Laser Based Failure Analysis
F. Zachariasse1, M. J. Goossens2, (1)Philips Semiconductors, Nijmegen, Netherlands, (2)Philips Research, Eindhoven, Netherlands

SYMP051.3

Dopant Imaging on Front Surface of Silicon Devices with a Coaxial Photon-Ion Column
R. G. Pajak1, E. Le Roy2, F. A. Baiocchi3, (1)Agere Systems, Allentown, PA, (2)Credence Systems Corp., Sunnyvale, CA, (3)LSI Corporation, Allentown, PA

SYMP051.4

Newly Developed Scanning Laser-SQUID Microscope
K. Nikawa, T. Sakai, NEC Electronics, Kawasaki, Japan

Session 2: Package Level Analysis 1

SYMP052.9

Stacked-Die Failure Mechanisms for an Octal, Current Input 20-Bit Analog-to-Digital Converter
B. K. Craigin, B. L. Zhou, J. R. Bridgmon, Texas Instruments Tucson Corporation, Tucson, AZ

SYMP052.10

Ag-on-Ag versus Sn-on-Ag Electrical Connectors for High Current and High Vibration Applications
P. Singh1, J. Lloyd2, J. Demarest1, L. Palmer1, L. Fischer3, W. Brodsky1, G. Hutt2, G. Thompson2, J. Kuczynski2, (1)IBM, Poughkeepsie, NY, (2)IBM T. J. Watson Research, Yorktown Heights, NY, (3)IBM, Hopewell Junction, NY

SYMP052.11

Analysis of Al-over-Cu Bond Pad Hillock and Pit Hole Defects
D. Cavasin, A. Yassine, Advanced Micro Devices, Austin, TX

SYMP052.12

Die Edge Thin Film Delamination on the Bottom Die of a Stacked Chip Scale Package (SCSP)
L. De la Rama, D. Nuarin, M. Nery, Intel Philippines Technology Philippines, Cavite, Philippines

Session 3: Die Level Fault Isolation

SYMP053.4

Multi-Point Probing on 65nm Silicon Technology using Static IREM-based Methodology
D. R. Bockelman, A. Rahman, I. Wan, S. Y. C. Chen, S. M. Ettinger, Intel Corporation, Hillsboro, OR

SYMP053.5

Failure Analysis of Soft Single Column Failure in Advanced 90nm SRAM Device with Internal Probing Techniques
H. S. Lin1, W. T. Chang1, C. H. Chao1, C. T. Lin1, J. Wang1, C. Lin2, (1)UMC, Hsin-Chu City, Taiwan, (2)No.3 Li-Hsin Rd. II , Science-Based Industrial Park, Hsin-Chu City,Taiwan 300, R.O.C., Hsin-CHu,Taiwan, Taiwan

SYMP053.6

The Effectiveness of OBIRCH Based Fault Isolation for Sub-90 nm CMOS technologies
M. De la Bardonnie1, R. Ross2, K. Ly2, F. Lorut3, M. Lamy3, C. Wyon4, L. Kwakman1, Y. HIRUMA5, J. ROUX6, (1)Philips Semiconductors, Crolles, France, (2)Freescale Semiconductor, Crolles, France, (3)STMicroelectronics, Crolles, France, (4)CEA-LETI, Grenoble, France, (5)Hamamatsu Photonics K. K., Hamamatsu city, Japan, (6)Hamamatsu France, Meylan, France

SYMP053.7

Dislocation Related Leakage in Advanced CMOS Devices
F. Siegelin, A. Stuffer, Infineon Technologies AG, Munich, Germany

Session 4: Panel Discussion 1: Strategic Development in FA. What Can We Get From Other Technical Sources?

SYMP054.1

Panel Member
J. Phang, National University of Singapore, Singapore, Singapore

SYMP054.2

Panel Member
C. Rue, FEI Company, Hillsboro, OR

SYMP054.3

Panel Member
M. Versen, University of Applied Sciences Rosenheim, Rosenheim, Germany

SYMP054.4

Panel Member
T. R. Lundquist, DCG Systems, Inc, Freemont, CA

Session 5: Panel Discussion 2: Can Competitors Build Some Common FA Facilities To Improve ROI And Efficiency?

SYMP055.1

Panel Member
G. Haller, ST Microelectronics, Rousset, France

SYMP055.2

Panel Member
C. Boit, TUB Berlin University of Technology, Berlin, Germany

SYMP055.3

Panel Member
V. Chowdhury, Altera Corp., San Jose, CA

SYMP055.4

Panel Member
A. J. Godrich, Intersil Corporation, Milpitas, CA

Session 7: Case Histories 1

SYMP056.1

Complementary Optical Techniques for Advanced IC Failure Analysis – Case Study
J. Y. Liao1, H. L. Marks1, H. Deslandes2, (1)NVIDIA, Santa Clara, CA, (2)DCG Systems, Fremont, CA

SYMP056.2

Scanning Optical Microscopy Application in Micron Memory Devices
E. Poh1, Y. Yuan2, D. Lam2, (1)Micron Semiconductor Asia Pte Ltd, Singapore, Singapore, (2)Micron Semiconductor Asia Pte. Ltd., Singapore, Singapore

SYMP056.3

Topside Defect Localization Using OBIRCH Analysis
C. Howard, A. Weerakoon, D. M. Mitro, D. Glaeser, Freescale Semiconductor, Inc., Austin, TX

SYMP056.4

Advanced Electrical Characterization of 90 nm Soft Bit Failure by Nano Probing Technique
C. Giret, D. Faure, Texas Instruments, Villeneuve Loubet, France

Session 6: Circuit Edit for FA, FI, and Debug

SYMP057.3

Contacting Diffusion with FIB for Backside Circuit Edit - Procedures and Material Analysis
U. Kerst1, R. Leihkauf2, B. Simmnacher3, P. Sadewater1, T. R. Lundquist4, R. Schlangen1, C. Boit1, E. LeRoy5, (1)TUB Berlin University of Technology, Berlin, Germany, (2)Hahn Meitner Institut, Berlin, Germany, (3)Infineon Technologies AG, Munich, Germany, (4)DCG Systems, Inc, Freemont, CA, (5)Credence Systems Corporation, Sunnyvale, CA

SYMP057.4

Novel and Practical Method of Through Silicon FIB Editing of SOI Devices
R. K. Jain1, T. R. Lundquist2, M. E. Antolik1, M. A. Thompson1, (1)Credence Systems Corporation, Sunnyvale, CA, (2)DCG Systems, Inc, Freemont, CA

SYMP057.5

The Joy of SOI: As Viewed from a Backside FIB Perspective
S. Herschbein1, C. Rue2, C. Scrudato1, (1)IBM Systems & Technology, Hopewell Junction, NY, (2)FEI Company, Hillsboro, OR

Session 11: Case Histories 2

SYMP058.1

Case Studies of the Use of Image Processing in Metrology and Failure Analysis
K. Ramanujachar, Intel Corporation, Chandler, AZ

SYMP058.2

Single Device Characterization by Nano-probing to Identify Failure Root Cause
C. C. Wu1, J. C. Lee2, J. H. Chuang1, T. T. Li1, (1)Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, Taiwan, (2)Altera Corp., San Jose, CA

SYMP058.3

Analysis of DRAM Standby Current Failure due to Hot Electron Induced Punch-through (HEIP) of PMOS transistor
M. H. Cho1, Y. I. Kim1, J. Choi2, D. S. Woo1, K. P. Lee1, Y. J. Park1, W. S. Lee1, B. I. Ryu1, (1)Samsung Electronics. Co. Ltd., Hwasung-City, Gyeonggi-Do, South Korea, (2)POM Group, Inc., Auburn Hills, MI

Session 10: Advanced Techniques 2

SYMP059.2

X-ray Fluorescence Imaging for High Resolution Elemental Mapping
M. Feser1, W. Yun1, Y. Wang2, S. Seshadri1, (1)Xradia Inc., Concord, CA, (2)Ohio State University, Columbus, OH

SYMP059.1

3-D EBIC Technique using FIB and EB Double Beam System
E. Yoshida, T. Tanaka, T. Oyamada, T. Koyama, J. Komori, S. Maegawa, Renesas Technology Corp., Itami-shi, Hyogo, Japan

SYMP059.3

Analysis of a Microcircuit Failure using SQUID and MR Current Imaging
F. S. Felt, NASA Goddard Space Flight Center, Greenbelt, MD

Session 8: Optical Techniques 1

SYMP0510.5

Dynamic Laser Delay Variation Mapping (DVM) Implementations and Applications
K. Sanchez1, R. Desplats1, F. Beaudoin2, P. Perdu1, S. Dudit3, G. L. Woods4, D. Lewis5, (1)CNES - French Space Agency, Toulouse, France, (2)IBM, (3)ST Microelectronics, Crolles cedex, France, (4)Rice University, Houston, TX, (5)IXL laboratory, Talence, France

SYMP0510.6

Soft Defect Localization Techniques without a Synchronization Signal to the Laser Scanning Module
D. M. Mitro, D. Glaeser, C. Howard, Freescale Semiconductor, Inc., Austin, TX

SYMP0510.7

Guideline for Interpreting IR Laser Stimulation Signal on Semiconductors Materials and Improving Failure Analysis Flow
A. Firiti1, G. Haller1, F. Beaudoin2, P. Perdu3, D. Lewis4, P. Fouillat4, (1)ST Microelectronics, Rousset, France, (2)IBM, (3)CNES-French Space Agency, 31401 Toulouse Cedex 9, France, (4)IXL laboratory, Talence, France

SYMP0510.8

Lock-In Assisted Soft Defect Localization (LIA-SDL) and its Application in Scan Shift Problem
C. Brillert, Z. Qian, C. Burmer, M. Grützner, Infineon Technologies AG, Munich, Germany

Session 9: System Level Analysis 1

SYMP0511.3

Furthering the Business Proposition of a Robust System Level Failure Analysis Framework: A Focus on Enabling Product Services
R. Bjork, Dell, Round Rock, TX

SYMP0511.4

Unique Failure Modes from use of Sn-Pb and Lead-Free (mixed metallurgies) in PCB Assembly: Case Study
F. Toth1, G. F. Shade2, (1)Intel Corporation, Hillsboro, OR, (2)Intel, Hillsboro, OR

SYMP0511.5

Analysis Methods for Characterizing Drop Test Robustness of Lead-Free FBGAs
J. Walter, R. Fischer, C. Birzer, Infineon Technologies AG, Regensburg, Germany

SYMP0511.6

Developing a More Inclusive System Level ESD Characterization Methodology
J. Rahardjo, S. Miller, L. Lopez, S. L. Williams, Dell Inc., Round Rock, TX

Session 12: Poster/Luncheon

SYMP0512.3

Stacked-Die Analysis Using C-Mode Scanning Acoustic Microscope
N. Li, J. Khan, L. Adams, National Semiconductor Corporation, Santa Clara, CA

SYMP0512.4

DuPont EKC265TM as a Copper Metal Etchant to Assist FIB Edits through Large Copper Power Supply Lines
R. E. Mulder, Freescale Semiconductor, Inc., Austin, TX

SYMP0512.5

Edge Enhancement Parameters for Acoustic Microscopy of Flip Chip Devices
D. J. D. Sullivan1, D. A. J. Komrowski1, L. A. Curiel1, K. V. Tan2, (1)LSI Logic, Fremont, CA, (2)LSI Logic Corporation, Fremont, CA

SYMP0512.6

Method of Failure Site Isolation for Flash Memory Device Using FIB, Passive Voltage Contrast Techniques
C. Yuan1, S. Li2, A. Gray3, (1)Spansion Inc, Sunnyvale, Sunnyvale, CA, (2)Spansion Inc, Sunnyvale, CA, (3)Spansion LLC, Sunnyvale, CA

SYMP0512.7

Increasing Planarity for Failure Analysis Using Blocked Reactive Ion Etching Combined with Planar Polish
M. E. Weldy1, L. Serrano2, (1)Intel Corporation, Folsom, CA, (2)Intel Corporation, Santa Clara, CA

SYMP0512.8

Nanomechanical Characterization in the FIB
T. Moore, Omniprobe, Inc., Dallas, TX

SYMP0512.9

Couple Passive Voltage Contrast with Scanning Probe Microscope to Identify Invisible Implant Issue
C. M. Shen1, S. C. Lin2, C. M. Huang2, H. X. Lin2, C. H. Wang2, (1)Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Hsin-Chu, Taiwan, (2)Taiwan Semiconductor Manufacture Company, Ltd., Tainan, Taiwan

SYMP0512.10

CAD - Less Blind Navigation in Focused Ion Beam System
V. Ray1, C. Gerlinsky2, (1)Particle Beam Systems & Technology, Methuen, MA, (2)Titus Consulting, Saskatoon, AB, Canada

SYMP0512.11

Method of Detecting Trace Metal Contamination in Thick-Film SOI Device
Y. Goto1, M. Iida2, H. Eguchi3, (1)Toyota Motor Corporation, Aichi, Japan, (2)JAPAN TECSEED CORPORATION, Aichi, Japan, (3)TOYOTA MOTOR CORPORATION, Aichi, Japan

SYMP0512.12

The Radio Probe(tm): A New Measurement Tool for High Speed Integrated Circuits
M. Kimball, Maxim Integrated Products, Hillsboro, OR

SYMP0512.13

High Resolution Acoustic Microscopy with Low Frequency and its Applications in Analysis of Ferroelectrics
Q. R. Yin, H. F. Yu, H. R. Zeng, G. R. Li, A. L. Ding, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, China

SYMP0512.14

Automated Sample Preparation of Low-k Dielectrics for FESEM
R. R. Cerchiara1, P. E. Fischione2, A. C. Robins2, D. W. Smith2, J. J. Gronsky2, J. M. Matesa2, S. J. Rozeveld3, C. A. Wood3, E. R. Beach3, J. Waeterloos3, H. A. Cook2, (1)E.A. Fischione Instruments, Inc., Export, PA, (2)E. A. Fischione Instruments, Inc., Export, PA, (3)The Dow Chemical Company, Midland, MI

SYMP0512.15

Depth Measurement of Dislocations in Si Substrate by Stereo TEM
J. S. Bow1, S. Yu2, (1)United Microelectronics Corporation, Hsinchu, Taiwan, (2)Unite Microelectronisc Corporation, Tainan County, Taiwan

SYMP0512.16

Gate Oxide Defect Localization and Analysis by Using Conductive Atomic Force Microscopy
Z. H. Lee1, C. J. Lin1, S. W. Lai2, J. H. Chou2, (1)Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Tainan, Taiwan, (2)Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Shan-Hua Tainan, Taiwan

SYMP0512.17

A Novel Method to Observe the Silicide in TEM
L. L. Lai, Semiconductor Manufacturing International Corporation, WuHan, HuBei, China

SYMP0512.18

The Enhancement of Abnormal Photon Emission Identification for Advanced Processes Using a Backside Cooling PEM System
C. H. Wang1, S. W. Lai1, Z. H. Lee1, J. H. Chou2, (1)Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Tainan, Taiwan, (2)Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Shan-Hua Tainan, Taiwan

SYMP0512.19

The Microstructure Evolution of Corrosion Phenomenon on Aluminum Bond Pads
J. S. Luo, H. M. Lo, J. D. Russell, Inotera Memories, Inc., Taoyuan, Taiwan

SYMP0512.20

Dynamic Electroluminescence Imaging as an “Optical Oscilloscope” Probe
J. Hulse1, K. Sarault2, M. Simard-normandin3, (1)National Research Council of Canada, Ottawa, ON, Canada, (2)NXP Semiconductors, Nijmegen, Netherlands, (3)MuAnalysis Inc., Ottawa, ON, Canada

SYMP0512.21

Thermal Imaging Product Power-up: Metrology for Capturirng Thermal Defects on Live Units Not Visible on any other Technique
N. T. Zamora, K. M. Chong, A. Gupta, Intel Technology Corporation, Cavite, Philippines

SYMP0512.22

Single Via Deprocessing Technique to Enable Physical Analysis for Semiconductor Process Integration
J. E. Hammett, W. Qin, T. David, Freescale Semiconductor Inc., Chandler, AZ

SYMP0512.23

EEPROM Failure Analysis Methodology: Can Programmed Charges be Measured Directly by Electrical Techniques of Scanning Probe Microscopy?
C. De Nardi1, R. Desplats2, P. Perdu3, F. Beaudoin4, J. L. Gauffier5, (1)CNES-French Space Agency, Toulouse, France, (2)CNES - French Space Agency, Toulouse, France, (3)CNES-French Space Agency, 31401 Toulouse Cedex 9, France, (4)IBM, (5)Institut National des Sciences Aplliquées (INSA), Toulouse, France

SYMP0512.24

Stacked Polysilicon/Metal Capacitors Failure Analysis
D. T. Nguyen1, F. Huang2, (1)Texas Intruments, Inc., Dallas, TX, (2)Texas Instrument, Inc., Dallas, Texas, TX

Session 13: Failure Analysis Process

SYMP0513.5

Studies on A Failure Analysis Flow of Surface Contamination/Corrosion/Underetch on Microchip Al Bondpads in Wafer Fabrication
Y. N. Hua1, C. C. L. Sin2, (1)GLOBALFOUNDRIES Singapore Pte Ltd, Singapore, Singapore, (2)StockerYale, Singapore, Singapore

SYMP0513.6

Root Cause Analyses of Metal Bridging for Copper Damascene Process
Z. Song1, S. P. Neo2, S. K. Loh2, C. K. Oh2, C. C. L. Sin3, (1)IBM, Hopewell Junction, NY, (2)Chartered Semiconductor Mfg Ltd, Singapore, Singapore, (3)StockerYale, Singapore, Singapore

SYMP0513.7

Strategies for the Analysis of Single Unit Failures in Low Failure Rate Applications
T. Kolasa, J. Kopycinski, A. Mendoza, Freescale Semiconductor, Tempe, AZ

SYMP0513.8

Failure Analysis Techniques for Lead Free Solder Joints
D. Shangguan1, T. Castello2, D. Rooney2, (1)Flextronics, San Jose, CA, (2)Flextronics, Youngsville, NC

Session 14: SPM Techniques 1

SYMP0514.1

Transmission Electron Microscopy and Scanning Capacitance Microscopy Analysis of Dislocation-Induced Leakages in n-channel I/O Transistors
M. L. Anderson, P. Tangyunyong, T. A. Hill, C. Y. Nakakura, T. J. Headley, M. J. Rye, Sandia National Laboratories, Albuquerque, NM

SYMP0514.2

Scanning Capacitance Microscopy Application for Bipolar and CMOS Doping Issue in Semiconductor Failure Analysis
C. Lin1, H. O. 734491, S. S. Lu2, C. H. C. 332201, (1)No.3 Li-Hsin Rd. II , Science-Based Industrial Park, Hsin-Chu City,Taiwan 300, R.O.C., Hsin-CHu,Taiwan, Taiwan, (2)National Taiwan University, Taipei, Taiwan, R.O.C, Taiwan

SYMP0514.3

Atomic Force Probing in Analog MOSFETs Measurement
K. Chen, T. Chattergee, K. Christensen, J. Rosal, H. Edwards, Texas Instrument, Inc., Dallas, TX

Session 16: Optoelectronic Devices

SYMP0515.2

An Atlas of ESD Failure Signatures in Vertical Cavity Surface Emitting Lasers
D. T. Mathes, J. Guenter, B. Hawkins, B. Hawthorne, C. Johnson, Advanced Optical Components, Richardson, TX

SYMP0515.3

Physics of Failure Investigation of Dark vertical-cavity surface-emitting lasers: Detection of Reverse-Bias Electroluminescence by Photo-Emission Microscopy
D. K. McElfresh, L. D. Lopez, R. Melanson, D. Vacar, Sun Microsystems, San Diego, CA

SYMP0515.4

3-D Defect Characterization using Plan View and Cross-Sectional TEM/STEM Analysis
T. J. Stark1, P. E. Russell2, C. Nevers3, (1)Materials Analytical Services, Raleigh, NC, (2)North Carolina State University, Raleigh, NC, (3)TriQuint Semiconductor, Hillsboro, OR

Session 15: Sample Preparation 1

SYMP0516.1

Improvement of Electrical Contacts in the Failure Analysis for In-Depth Characterization of Structures and Products
M. Huettinger, J. Touzel, Infineon Technologies AG, Munich, Germany

SYMP0516.3

The Versatile Application for In-situ Lift-out TEM Sample Preparation by Micromanipulator and Nanomotor
J. C. Lee, B. H. Lee, Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, Taiwan

SYMP0516.4

Failure Analysis of Electronic and Microelectronic Components with a New Automatic Target Preparation System
K. Reiter1, H. Bundgaard2, (1)Fraunhofer Institute of Silicon Technology, Itzehoe, Germany, (2)Struers A/S, Ballerup, Denmark

SYMP0516.6

Investigation of Passivation Damage from the Backside
S. Subramanian, E. Widener, T. Chrastecky, W. Jones, D. Jones, R. Mulder, Freescale Semiconductor, Inc., Austin, TX

Session 18: Nanotechnology Analysis

SYMP0517.2

X-Ray Nanoanalysis in the SEM
D. Chernoff1, W. E. Vanderlinde2, (1)Small World LLC, Vienna, VA, (2)Laboratory for Physical Sciences, College Park, MD

SYMP0517.3

Kinematical Simulation of HOLZ Pattern for [110] Uniaxial Strain Determination
T. H. Chen, J. S. Bow, United Microelectronics Corporation, Hsinchu, Taiwan

SYMP0517.4

3D Observation of Elemental Distribution of Si-Device using a Dedicated FIB/STEM System
T. Yaguchi1, M. Konno1, T. Kamino1, M. Ogasawara1, K. Kaji2, T. Ohnishi2, M. Watanabe3, (1)Hitachi High-Technologies corporation, Hitachinaka-shi, Japan, (2)Hitachi High-Technologies Corporation, hitachinaka, Japan, (3)Lehigh University, Bethlehem, PA

Session 17: Optical Techniques 2

SYMP0518.1

Advanced Optical Testing of an Array in 65 nm CMOS Technology
F. Stellari1, P. Song2, T. A. Christensen3, (1)IBM Research, Yorktown Heights, NY, (2)IBM, Yorktown Heights, NY, (3)IBM, ROCHESTER, MN

SYMP0518.2

Analog Circuit Failure Analysis Using Time-Resolved Emission
B. J. Cain1, G. L. Woods2, R. Herlein3, A. Syed1, T. Nomura4, (1)Credence Systems Corp, Sunnyvale, CA, (2)Rice University, Houston, TX, (3)Credence Systems Corp, San Jose, CA, (4)Credence Systems Corp, Kawasaki-shi,Kanagawa-ken, Japan

Session 19: Yield Enhancement

SYMP0519.2

Burn-In Acceleration Considerations in 130nm and 90nm Products
N. Wakai, Y. Kobira, T. Setoya, T. Oishi, S. Yamasaki, Toshiba Corporation, Yokohama, Japan

SYMP0519.3

Statistical Evaluation of Scan Test Diagnosis Results for Yield Enhancement of Logic Designs
C. Burmer, A. Leininger, H. P. Erb, M. Gruetzner, T. Schweinboeck, S. Trost, Infineon Technologies, Munich, Germany

SYMP0519.4

In-Line Voltage Contrast Inspection of Ungrounded Chain Test Structures for Timely and Detailed Characterization of Contact and Via Yield Loss
O. D. Patterson1, H. Wildman1, A. Ache1, K. Wu2, (1)IBM Corporation, Hopewell Junction, NY, (2)KLA-Tencor, Hopewell Junction, NY

SYMP0519.5

Impact of Metal Pad Etch-Induced Plasma Damage on Dynamic Retention Time Degradation during High Temperature Stress in High Density DRAM Technology
D. Kim1, I. G. Kim1, J. Y. Noh1, H. J. Lee1, S. H. Park2, J. H. Lee3, S. W. Lee1, K. H. Yang1, J. Park1, D. Shin1, K. Oh1, (1)SAMSUNG Electronics, Hwasung, South Korea, (2)RIST, Po-Hang, South Korea, (3)Kwangwoon University, Seoul, North Korea

SYMP0519.6

Effect of the Ash Chemistries on the TDDB Lifetime of the Cu/ULK Dielectrics
D. H. Su1, L. C. Chen2, J. B. Lai3, J. L. Yang2, R. Huang3, R. L. Huang2, J. S. Tsai2, J. H. Shieh2, S. M. Jang2, M. S. Liang2, (1)Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, Taiwan, (2)TSMC, Hsinchu, Taiwan, (3)Taiwan Semiconductor Manufacturing Company, Hsinchu, Taiwan

Session 20: Discretes, Passives, and MEMS

SYMP0520.2

Deprocessing of Integrated Sealing Structures from MEMS Devices for Failure Analysis
T. J. Barbieri1, J. Vandemeer2, (1)Freescale Semiconductor, Inc., Tempe, AZ, (2)Akustica, Inc., Pittsburgh, PA

SYMP0520.3

A New Non Destructive Method to Screen for Corona/Breakdown of a Transformer Core
G. Molle, Rockwell Collins Government Systems San Jose, San Jose, CA

SYMP0520.4

Unique Autoclave Stress Induced Failure Mechanism
J. Butchko1, B. T. Gillette2, (1)Fairchild Semiconductor, Mountaintop, PA, (2)Fairchild Semiconductor Corp, Mountaintop, PA

SYMP0520.5

Hot Electron Induced Fiber Optic Transistor Beta Degradation, Recovery, and Dynamics of Hydrogen Atoms at the Si-SiO2 interface layer
K. Seo, J. Monarch, B. Dunlap, Metronic Microelectronics Center, Tempe, AZ

Session 21: Metrology and Materials Analysis

SYMP0521.1

Development of High Accuracy Automatic Magnification Calibration Function for Scanning Transmission Electron Microscope
H. Inada1, D. Terauchi1, R. Tsuneta2, A. Takane1, S. Aizawa1, H. Tanaka1, M. Konno3, M. Ozawa3, R. Tsuneta2, K. Nakamura2, (1)Hitachi High-Technologies Corporation, Hitachinaka, Japan, (2)Hitachi Ltd., Kokubunji, Japan, (3)Hitachi Science Systems, Hitachinaka, Japan

SYMP0521.2

Methodology of Optimum-kV BSE application in SEM and summary of characteristic for low energy SEM/EDS/FIB
L. L. Lai, Semiconductor Manufacturing International Corporation, WuHan, HuBei, China

SYMP0521.3

In-line High-Resistance Tungsten Plug Defect Monitoring with an Advanced E-Beam System
H. Xiao1, M. Tsai2, H. Liu2, J. H. Yeh2, S. Lin2, K. Wang2, S. C. Lei2, J. Jau3, W. Y. Wu4, H. C. Wu4, (1)Hermes Microvision, Inc., San Jose, CA, (2)United Microelectronics Corp, Tainan County, Taiwan, (3)Hermes Microvision, Taiwan, (4)Hermes Systems, Hsinchu, Taiwan

SYMP0521.4

A Fast and Inexpensive Product Screening Method for R.O.H.S. Compliance
P. Mazurkiewicz, Hewlett-Packard Corporation, Fort Collins, CO

SYMP0521.5

An Overview of 300 mm SOI Starting Wafer Quality and Its Yield Detractors
P. Y. Tsai1, J. Lee1, P. Ronsheim1, L. Burns1, R. Murphy1, M. Almonte1, G. Pfeiffer1, R. Kleinhenz1, M. Guse1, H. Hovel2, D. Sadana2, (1)IBM, Hopewell Junction, NY, (2)IBM, Yorktown Height, NY

Session 22: System Level 2/Packaging 2/SPM 2

SYMP0522.2

System Failures Due to Contamination Out Gassing
M. A. Nailos, D. Stein, V. G. Hernandez, Dell, Inc., Round Rock, TX

SYMP0522.3

Using High Speed Camera Metrology In Support of Failure Analysis and Product Development
W. Hezeltine, F. Z. Liang, R. L. Williams, Intel Corporation, Hillsboro, OR

SYMP0522.4

Integration of Package Analysis Tools to Solve Discontinuity Failures
S. Hsiung1, K. V. Tan2, (1)LSI Logic, Fremont, CA, (2)LSI Logic Corporation, Fremont, CA

SYMP0522.5

The Study and Methodology of Defects Isolation For Contacts of Non-Isolated Active Region on New Logic Designs
C. H. Wang1, C. M. Shen1, C. J. Lin1, Z. H. Lee1, J. H. Chou2, (1)Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Tainan, Taiwan, (2)Taiwan Semiconductor Manufacture Company, Ltd., Taiwan, Shan-Hua Tainan, Taiwan

SYMP0522.6

Focused Ion Beam Method for Reconditioning Worn Tungsten Atomic Force Probe Tips
R. E. Mulder1, S. Subramanian2, T. Chrastecky2, (1)Silicon Labs, Austin, TX, (2)Freescale Semiconductor, Inc., Austin, TX

Session 24: Test

SYMP0523.4

Advanced Scan Diagnosis Based Fault Isolation and Defect Identification for Yield Learning
C. Eddleman1, N. Tamarapalli2, W. T. Cheng2, (1)LSI Logic, Fort Collins, CO, (2)Mentor Graphics, Wilsonville, OR

SYMP0523.6

Diagnosis of Multiple Scan Chain Faults
C. L. Kong, M. R. Islam, Intel Corporation, Santa Clara, CA

Session 23: Sample Preparation 2

SYMP0524.1

An Alternative to High-Temperature and Acid/Solvent-Based Methods for Removing Integrated Circuits from Ceramic or Other Problem Substrates
C. M. Nail, Independent, San Jose, CA

SYMP0524.2

Sectioning Integrated Circuit Ceramic Packages for Improved Electromigration Failure Analysis
B. Tracy1, J. Barragan2, E. Raz3, Z. Shafrir4, (1)Spansion, LCC, Sunnyvale, CA, (2)Spansion, Sunnyvale, CA, (3)Gatan Inc, Pleasanton, CA, (4)Sagitta, Kfar Saba, Israel

Tutorial

Device and Test 1

GEN051.1

CMOS Electronics and Defect Analysis
C. Hawkins, University of New Mexico, Albuquerque, NM

GEN051.2

Failure Modes in Nanometer Technologies
C. Hawkins, University of New Mexico, Albuquerque, NM

GEN051.3

Analog Circuit Failure Analysis
S. Frank, Texas Instruments, Inc., Dallas, TX

GEN051.4

Failure Analysis of DRAM Memories
M. Versen, University of Applied Sciences Rosenheim, Rosenheim, Germany

Device and Test 2

GEN052.1

Failure Analysis of SRAM Memory
S. Gunturi, Texas Instruments, Dallas, TX

GEN052.2

FLASH Memory Failure Analysis
S. Khalsa, O. D. Camposagrado, Intel Corporation, Folsom, CA

GEN0517.3

Scan Diagnostics
S. Venkataraman, Intel Corporation, Hillsboro, OR

GEN0511.3

Automated Test Pattern Generation (New for 2005)
M. Keim, Mentor Graphics, Wilsonville, OR

Introduction

Microscopy Tools 1

GEN054.1

Optical and Infrared FA Microscopy
J. J. McDonald, Quantum Focus Instruments Corporation, Vista, CA

Microscopy Tools 2

GEN055.1

SEM Basics
W. E. Vanderlinde, Laboratory for Physical Sciences, College Park, MD

GEN055.2

Focused Ion Beam for Fault Isolation and Circuit Editi/Design Debug Tool (New for 2005)
C. Richardson1, S. Herschbein2, C. Rue3, (1)Abound Solar, Fort Collins, CO, (2)IBM Systems & Technology, Hopewell Junction, NY, (3)FEI Company, Hillsboro, OR

GEN055.3

Focused Ion Beam - A Sample Preparation Tool (New for 2005)
K. (. Hooghan, FEI KAUST, Saudi Arabia

GEN055.4

Transmission Electron Microscopy
S. Subramanian, Freescale Semiconductor, Inc., Austin, TX

GEN055.5

Advanced Techniques in Sample Preparation and TEM Analysis of Microelectronic Materials
R. R. Cerchiara, E.A. Fischione Instruments, Inc., Export, PA

Microscopy Tools 3

GEN056.1

Ultra-High Resolution in the SEM
W. Vanderlinde, Laboratory for Physical Sciences, College Park, MD

GEN056.2

Materials Characterization for Failure Analysis
L. Wagner, Texas Instruments, Dallas, TX

GEN056.3

Monte Carlo Simulations for Materials Analysis (New For 2005)
D. Chernoff1, W. Vanderlinde2, (1)Small World LLC, Vienna, VA, (2)Laboratory for Physical Sciences, College Park, MD

GEN056.4

The Role of the Atomic Force Microscope in Failure and Yield Analysis
J. Colvin1, A. Erickson2, (1)FA Instruments, San Jose, CA, (2)Multiprobe, Inc., Santa Barbara, CA

Device and Test 3

GEN057.1

Electrical Overstress (EOS) in Semiconductor Devices: How to Differentiate and Document EOS due to Over-Current or Over-Voltage Conditions (New for 2005)
C. Lewis, Texas Instruments, Dallas, TX

GEN057.2

EOS/ESD - TLP Testing of Electronic Components
L. G. Henry, ESD-TLP Consulting & Testing, Fremont,, CA

GEN057.3

Optoelectronics Failure Analysis
R. Herrick, Finisar Corporation, Santa Jose, CA

Failure Analysis Basics

GEN058.1

Failure Analysis Process Basics (New for 2005)
V. Chowdhury, Altera Corp., San Jose, CA

GEN058.2

Classic Case Histories (New for 2005)
J. Colvin, FA Instruments, San Jose, CA

Packaging 1

GEN059.1

Chip Scale Packages and its Failure Analysis Challenges
S. Li, Spansion Inc, Sunnyvale, CA

GEN059.2

X-Ray & SAM Challenges for IC Package Inspection
T. Moore, Omniprobe, Inc., Dallas, TX

GEN059.3

Fault Isolation in Electronic Packaging and On-Chip Using Time Domain Reflectometry
D. Smolyansky, TDA Systems, Lake Oswego, OR

GEN059.4

Stacked Die and Repackaging for Failure Analysis
D. Maxwell, R. D. Harrison, Texas Instruments, Dallas, TX

Packaging 2

GEN0510.1

Advanced PCB and SMT Assembly Failure Modes and Mechanisms
N. J. Armendariz, Intel, Hillsboro, OR

System Level ESD Testing Using the Transmission Line Pulse (TLP) Methodology
L. G. Henry, ESD-TLP Consulting & Testing, Fremont,, CA

Failure Analysis Laboratory Management

GEN0511.1

Cost of Debug and FA
S. P. Maher, Oklahoma Christian University, Oklahoma City, OK

GEN0511.2

Failure Analysis Lab Management Overview
R. Ross, Independent, VT

Failure Mechanisms

GEN0512.1

Electromigration in Copper Interconnects – Failure Analysis and Degradation Studies
E. Langer, GLOBALFOUNDRIES, Dresden, Germany

GEN0512.2

Physics of Failure – The Good Part about Bad Parts
C. Bunis, M/A-COM Tyco Electronics, Lowell, MA

Fault Isolation 1

GEN0513.1

Magnetic Based Current Imaging for Fault Isolation in Die and Packages
L. A. Knauss, Booz Allen Hamilton, Annapolis Junction, MD

GEN0513.2

Flip-Chip and Backside Analysis Techniques
E. I. Cole1, D. L. Barton2, K. Bernhard-Höfer3, (1)Sandia National laboratories, Albuquerque, NM, (2)Sandia National Laboratories, Albuquerque, NM, (3)Infineon, Munich, Germany

GEN0513.3

Beam-Based Defect Localization Techniques
E. I. Cole, Sandia National laboratories, Albuquerque, NM

Fault Isolation 2

GEN0514.1

Photonic Localization Techniques
C. Boit, TUB Berlin University of Technology, Berlin, Germany

GEN0514.2

Lock-in Thermography (New For 2005)
O. Breitenstein1, C. Reuss2, D. Karg2, (1)Max Planck Institute of Microstructure Physics, Halle, Germany, (2)Thermosensorik GmbH, Erlangen, Germany

MEMS

GEN0515.1

Introduction to Microelectromechanical Systems (MEMS) Materials and Fabrication Processes
J. A. Walraven, Sandia National Labs, Albuquerque, NM

GEN0515.2

Optoelectronic Techniques for MEMS and Electronic Packaging Characterization
C. Furlong, Worcester Polytechnic Institute, WPI, Worcester, MA

GEN0515.3

MEMS Development: A DMD Case Study
M. Douglass, Texas Instruments, Plano, TX

Prize Drawing

Yield

GEN0517.1

Yield Basics for Failure Analysis
T. Myers, J. Hanson, ON Semiconductor, Gresham, OR

GEN0517.2

The Challenges and Advantages of Logic Mapping
K. S. Wills1, M. Forbes2, A. K. Vij2, G. Ontko2, (1)Independent Consultant, Sugar Land, TX, (2)Texas Instruments, Stafford,, TX

Sample Preparation

GEN0518.1

Chip Access and Depackaging
O. Diaz de Leon1, K. S. Wills2, (1)Texas Instruments, Stafford, TX, (2)Independent Consultant, Sugar Land, TX

GEN0518.2

Deprocessing
K. S. Wills1, S. Perungulam2, (1)Independent Consultant, Sugar Land, TX, (2)Texas Instruments, Stafford,, TX