J. S. Luo, C. C. Huang, J. D. Russell, Inotera Memories, Inc., Taoyuan, Taiwan

Summary: We have shown that our novel electron tomography sample preparation method is a useful technique to improve the critical image alignment procedure, which is essential for successful tomography. We have also successfully applied a modified version of the technique to deposit gold beads onto TEM pillar samples for much improved 3-D reconstruction.