Combining Refractive Solid Immersion Lens and Pulsed Laser Induced Techniques for Effective Defect Localization on Microprocessors

Wednesday, November 5, 2008 - 4:50 PM

Combining Refractive Solid Immersion Lens and Pulsed Laser Induced Techniques for Effective Defect Localization on Microprocessors

A. C. T. Quah, S. H. Goh, J. C. H. Phang, National University of Singapore, Singapore, Singapore; V. K. Ravikumar, S. L. Phoa, V. Narang, J. M. Chin, Advanced Micro Devices Singapore Pte Ltd, Singapore, Singapore; C. M. Chua, SEMICAPS PTE LTD, Singapore, Singapore, Singapore

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Summary: We have successfully applied both Refractive Solid Immersion Lens (RSIL) and pulsed-TIVA for defect localization and demonstrated significant improvements in defect localization precision. The full paper would include more case studies to demonstrate how RSIL and pulsing compliment each other to enhance both detection sensitivity and localization precision.