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Monday, November 3, 2008 - 4:00 PM

Advanced Techniques in Sample Preparation and TEM Analysis of Microelectronic Materials

R. R. Cerchiara, E.A. Fischione Instruments, Inc., Export, PA

Methods of preparing and analyzing samples by high resolution TEM and STEM will be discussed. Sample preparation using conventional, concentrated and focused ion beams will be highlighted by means of application examples. The advanced imaging and analytical techniques will include tomography, holography, EBIC and the in situ imposition of magnetic fields.