The Scanning Probe Microscope (SPM) has become an indispensable tool for failure analysis and FAB process characterization. The SPM more commonly known as the Atomic Force Microscope (AFM) can do much more than just image a surface. Use of SPM in FA is increasing as the device dimensions shrink to the realm of nano-technology. The SPM brings a set of tools for FA such as Atomic Force Probing (AFP) for direct measurement of internal node devices, Capacitance Microscopy (SCM) for dopant delineation, Current Imaging, Thermal Mapping and many others.