T Atomic Force Probe is quickly becoming an indispensable part of a modern semiconductor FA lab. The AFP is a tool of choice for the successful characterization of failing semiconductor devices. This tutorial will provide an overview of AFP with emphasis on the following: a) Sample Preparation, b) Probe Tip Integrity: Handling and Storage, c) Vibration and Drift Issues, d) Current Contrast Imaging Techniques e) Transistor Probing and Characterization f) Copper VIA and Metallization Probing g) Case Studies.