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Session 8: Scanned Probe Microscopy
Location: Portland Ballroom 254 (Oregon Convention Center )
(Please check final room assignments on-site).
Session Description:

Session Chairs:Mr. Phil Kaszuba IBM Microelectronics, Essex Junction, VT
Mr. Terence Kane IBM, Hopewell Junction, NY
9:50 AMNano CV Probe Characterization Analysis Comparison with Conventional CV Probe Pad Analysis
10:15 AMAnalysis of Deep Trench Node Leakage Depth by applying Current Imaging Technique at Silicon Level
10:40 AMNetworking Lunch