|
||||
| Back to "Tutorial" Search | Back to Main Search | |||
| MEMS Devices | ||||
| Location: Meeting Room F150 (Oregon Convention Center ) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: | ||||
| Session Chair: | Mr. Jeremy A. Walraven Sandia National Labs, Albuquerque, NM | |||
| 4:00 PM | Introduction to Microelectromechanical Systems (MEMS) Materials and Fabrication Processes | |||
| 5:15 PM | Optoelectronic Techniques for MEMS and Electronic Packaging Characterization | |||