BiSrCaCuO thin films are fabricated by an ion beam sputtering method, and sticking coefficients of the respective elements are evaluated. The sticking coefficient of Bi element in BiSrCaCuO film formation was observed to show a unique temperature dependence; it was almost a constant value of 0.49 below about 730�� and decreased linearly over about 730��. In contrast, Sr and Ca, displayed no such remarkable temperature dependence. This behavior of the sticking coefficient was explained consistently on the basis of the evaporation and sublimation processes of Bi₂O₃. It was concluded that Bi(2212) thin film constructs from the partial melted Bi(2201) phase with the aid of the liquid phase of Bi₂O₃.