Residual stresses and the resulting dimensional changes due to thermal-spraying with blasting can be a major factor in affecting the performance of fabricated parts and components. Manufacturing costs are also significantly impacted by difficulties in obtaining the required final shape of a product. Though the X-ray method for measuring the residual stress has been widely used, the residual stress distribution of thermal-sprayed parts and components can not be analyzed easily. In this paper, it was made clear the behaviors of residual stress and deformation of thermal-sprayed member with blasting treatment by use of finite element analysis and it was newly proposed the inherent strain method for analyzing the residual stress and deformation . It was also confirmed that the inherent strain method due to deflection measurement was applicable to estimate the residual stress distribution in case of the titanium plasma sprayed steel plate (JIS SS400) with blasting treatment.