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Electronic and Semiconductor Applications

Organizers:

A. Ashary Praxair Electronics Indianapolis, IN Advances in Coatings, Processing and Diagnostics for Semiconductor Equipment and Electronics Applications	H. Shih LAM Research Fremont, CA Plasma Sprayed Ceramics in Semiconductor Equipment and Electronics Applications
H. Wang Applied Materials Inc Santa Clara, CA The Role of Coatings in the Semiconductor Equipment, Flat Panel Display and Electronics Industries	R. Gansert AMTS Incorporated Simi Valley, CA Thermal Spray Metallic Coatings for Use in Semiconductor Defect Reduction and Electronic Interconnects

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Overview:

Thermal spray coatings are used in a broad range of applications in the semiconductor equipment, flat panel display and electronics industries. Thermal spray ceramic coatings are used in these industries for desired electrical resistivity, dielectric constant and dielectric strength, for chemical and corrosion-resistance to components, and for a host of other purposes. In semiconductor equipment applications, metallic coatings are used for a range of applications including reducing particle generation in process chamber operations during thin film deposition. The coatings used for all these industries improve the performance and extend the service times of operations they are involved. The Electronics and Semiconductor Applications Symposium is being organized to provide a forum for researchers, engineers, manufacturers and end-users to present the latest developments in these areas and to discuss critical issues involving the use of coatings.