R. Gansert, AMTS Incorporated, Simi Valley, CA
Thermal spray coatings are used in a broad range of applications in the semiconductor equipment and electronics industries. Thermal spray metallic coatings are used for a range of applications in the semiconductor equipment industry including particle reduction and contamination control in process chamber operations during thin film deposition. Thermal-sprayed ceramic coatings are used in these industries for desired dielectric properties, for chemical and corrosion-resistance to components, and for a range of other purposes. This paper will review the growth of the coatings in the semiconductor equipment and electronic industries over the past decade including the companies involved, application areas, coating processes, coating materials, patents & patent applications, and trends.
Summary: Thermal spray coatings are used in a broad range of applications in the semiconductor equipment and electronics industries. This paper will review the growth of the coatings in the semiconductor equipment and electronic industries over the past decade including the companies involved, application areas, coating processes, coating materials, patents & patent applications, and trends.
