Process Monitoring and Control for Semiconductor and Solar Applications

Semiconductor manufacturing has one of the most stringent requirements for process and quality control of all industries. Allied technologies such as solar and LED manufacturing closely follow quality procedures originated in the semiconductor industry. Maintenance of process chamber integrity and cleanliness are of importance for semiconductor (including LED) industry while sputtering target consistency is essential for the solar industry. Thermal spray processing is utilized to enhance performance in both these areas.

We present here various aspects of process monitoring and control for thermal spray and associated processes encompassing the different parts that are processed in the semiconductor and solar industries. Considerations for process monitoring and control are discussed in the context of various time scales involved in processing of parts as well as their application requirements. Advances in process monitoring are discussed and complexities of the issues are outlined.