Behavior of Thermal Sprayed Ceramic Coatings Under the Plasma Etching Environment

Tuesday, May 14, 2013: 4:00 PM
C105 (Busan Exhibition and Convention Center)
Mr. Hiroki Yokota , TOCALO Co.,Ltd., AKASHI, Japan
Mr. Mitsuharu Inaba , TOCALO Co., Ltd., AKASHI, Japan

Abstracts: