Session 2

Wednesday, May 15, 2013: 10:20 AM-12:00 PM
C103 (Busan Exhibition and Convention Center)
10:20 AM
Thermal Spray Coatings Considerations in the Semiconductor Equipment Design and Chamber Operation
Mr. Joe Sommers, Applied Materials
11:00 AM
Relationships of Different Al2O3-Based Powders and Thermal Spray Processes On Electrical Properties of the Coatings
Mr. Tomi Suhonen, VTT Technical Research Centre of Finland; Ulla Kanerva, VTT Technical Research Centre of Finland; Tommi Varis, VTT Technical Research Centre of Finland; Jarkko Metsäjoki, VTT Technical Research Centre of Finland; Ms. Minna Niittymäki, Tampere University of Technology; Bram Rotthier, Tampere University of Technology; Kari Lahti, Tampere University of Technology
11:20 AM
Progress in Very Dense and High Purity Yttria Coatings by APS Enabled by a New Yttria Powder
Dr. Alain Allimant, Saint-Gobain C.R.E.E.; Mr. Dominique Billières, Saint-Gobain Coating Solutions; Mr. Howard Wallar, Saint-Gobain Ceramics & Plastics
11:40 AM
Microstructure and Electrical Properties of Plasma Sprayed Mixture of Cr2O3 and TiO2
Dr. Pavel Ctibor, IPP ASCR; Dr. Igor Pis, Faculty of Mathematics and Physics, Charles University; Dr. Zdenek Pala, IPP ASCR; Dr. Vaclav Stengl, IIC ASCR; Ivan Khalakhan, Faculty of Mathematics and Physics, Charles University; Jiri Kotlan, Faculty of Electrical engineering CTU; Vaclav Nehasil, Faculty of Mathematics and Physics, Charles University
12:00 PM
Lunch
See more of: Electronic and Semiconductor Applications
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