Thermal Spray Coating Opportunities & Considerations in the Semiconductor Equipment Industry

Thermal spray coatings are used in a broad array of applications in the semiconductor equipment industry.  Thermal spray metallic coatings are used for a range of applications in the semiconductor equipment including particle reduction and contamination control in process chamber operations during thin film deposition.   Thermal-sprayed ceramic coatings are used in these industries for desired dielectric properties, for chemical and corrosion-resistance for components, and for a range of other purposes.   This talk will review Applied Materials vision of coatings in the semiconductor equipment for the future as well as the coating challenges of today.  Areas to be discussed may include coating design considerations for application to semiconductor chamber equipment; issues chemical, corrosion and erosion issues, or standards (or standard of practice) for materials, processing, finishing and cleaning involved in the utilization of coatings.  And finally Applied Materials will discuss their vision of advances needed in materials, coatings and diagnostics.