Study of Spray Condition for High Concentration Y2O3 Suspension to Improve Electrical Properties.

Y2O3 coatings obtained by the plasma spraying are applied for applications utilizing the plasma erosion resistance and electrical insulation properties of such electronics devise manufacturing equipment components. In recent years, it has been considered that Y2O3 coatings with excellent electrical properties can be obtained by suspension plasma spraying (SPS) at semiconductor equipment industries. However, the fabrication of coating with SPS process is a time- and cost-intensive technology. In case of applying Y2O3 SPS coatings in semi-conductor equipment industries, the productivity of SPS process is one of the biggest issues. Although there are some reports regarding higher deposition rate using with higher concentration suspension of YSZ, YAG.Y2O3 suspensions with different concentrations are sprayed by 100kW class high power suspension plasma spray system by changing the parameters. This study focuses on the investigation of about SPS process influence (the temperature and velocity of in-flight particles) for electrical properties of coating prepared with Y2O3 high concentration suspension. Therefore, optimization of spray condition is important to achieve requirement characteristics of coating for semiconductor equipment industries several spray conditions resulted higher deposition rate, coating density and dielectric strength compared with lower concentrations.