Oxygen Plasma Treatment on Adhesion Improvement of Au Deposited on Pa-c Substrates

Adhesion of gold on parylene C (Pa-c) is a major hurdle in achieving reliable and durable performance for biosensor application due to the hydrophobicity of Pa-c. It is, therefore, imperative to put efforts to improve adhesion between Au and Pa-c. In this reseach, oxygen plasma treatment for adhesion improvement was performed on Pa-c surfaces at various plasma powers and times. To analyze the relation of surface energy and roughness to adhesion promotion, we used several techniques such as contact-angle, surface-energy, surface-roughness, and adhesion analyses. As the oxygen plasma power and time were increased, the surface roughness of Pa-c increased. Also, Au films had larger and more uniform grain sizes as the oxygen plasma power and time were increased. Untreated surfaces revealed a contact angle of 108 º, but the contact angle drastically decreased in the initial stage of oxygen plasma treatment and slowly decreased with increasing power and time to values of 27.3 and 34, respectively. From the adhesion analysis, adhesion was improved as the plasma power or time was increased. The improvement of adhesion is related to an increase in roughness as well as carbonyl groups.