Recent theory predicted a new class of meta structures made of engineered sub wavelength entities - meta “atoms” and “molecules” which enable the unprecedented electromagnetic properties that do not exist in the nature. For example, artificial plasma and artificial magnetism, and super lens that focuses far below the diffraction limit. If the theory is correct and these unique properties can be realized, it will have profound impact in wide range of applications such as nano-scale imaging, nanolithography, and integrated nano photonics. These photonic “atoms” usually form highly complex structures which present a critical need in developing truly 3D micro and nano-manufacturing techniques which are not available presently. In the first part of this presentation, I’ll discuss a few micro and nano fabrication technologies that we developed for engineering complex meta-structures. In the second part, I’ll discuss sub-l photonic “atoms” and “molecules” and the potential applications in nano-scale imaging and lithography. We demonstrated, for the first time, the high frequency magnetic activity at THz generated by artificially structured “molecule resonance”, as well as the artificial plasma. Our experiment also confirmed the key proposition of super lens theory by using surface plasmon. We indeed observed preliminary superlensing at near-field. The surface plasmon indeed promises an exciting engineering paradigm of “optical frequency and x-ray wavelength”. This talk will be concluded with a vision of the nano-manufacturing that will enable the new nano plasmonics and other applications.