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Wednesday, August 3, 2005 - 2:30 PM
SES .1

The Measurement of Ultrafine Particles Created During a Surface Micromachining Process Using a Portable Particle Counting Technique

R. Handy, M. J. Jackson, G. Robinson, Purdue University, West Lafayette, IN; M. D. Lafreniere, Ohio University-Chillicothe, Chillicothe, OH

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Summary: Ultrafine particles can be accurately monitored in the work environment with portable instruments. A technique involving the use of both a direct-reading condensation particle counter and a laser counter was used to measure airborne concentrations of particles during a micromachining process.