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Monday, August 1, 2005 - 11:00 AM
SMT053.5

Integrated Multi-Sensor+AFM Nano+Micro Metrology of Coatings

N. V. Gitis, J. Xiao, S. Kuiry, Center for Tribology, Inc., Campbell, CA

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Summary: A novel multi-sensor technology with simultaneous measurements of friction force and coefficient, contact electrical resistance and acoustics, temperature, and wear depth, couple with integrated both scanning force and optical microscope imaging, has been utilized to characterize durability of thin films and coatings, with in-situ monitoring their changes during micro and nano indentation, scratching, reciprocating, rotating and other tests.