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Tuesday, May 9, 2006 - 9:30 AM
MEM5.2

Plastic Deformation of Sputtered NiTi Thin Films on Polyimide Substrates

J. Foltz, D. S. Grummon, Y. Zhang, Michigan State University, East Lansing, MI

While much attention has been paid to shape-memory thin films for actuators in silicon-based micromachines, less thought has been given to the potential for sputtered films to replace wires in more macroscopic applications.  The cross-sectional area of a 2.5 mm wide by 5-micron thick sputtered film is the same as that of an .005-inch diameter wire, but the film has a 10-fold advantage in surface-to-volume ratio.  It therefore has much better heat transfer characteristics, and the form-factor offers a broad and flat surface for mechanical and electrical attachment.  In this paper we show how sputtered thin-film actuator materials can be made in large quantity, and at low cost, through the use of thin polyimide substrates.  Furthermore we have developed a method to cold-deform large sheets of these materials, in uniaxial and/or unbalanced biaxial tension.  This discovery has several important implications for thin-film actuators:  First, cold-deformation of the austenite will permit the development of very high strength as well as the favorable crystallographic textures found in conventional wrought SMAs.  Secondly, cold-deformation of the martensite will allow production of “pre-programmed” shape-memory elements that will be easy to integrate with other mechanisms, and which need not rely on additional mechanical elements for biasing.  This suggests a very wide range of potential applications, from low-cost discrete linear or planar multiaxial actuators, to highly functional “smart-membrane” materials.


Summary: This paper describes fabrication methods and applications of pre-deformed NiTi thin films on polyimide substrates for low-cost actuators and functional membranes