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| 6B Thin Films-Processing & Applications | ||||
| Location: Room 202 (Tsukuba International Congress Center) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: | ||||
| Session Chair: | Dr. Akira Ishida National Institute for Materials Science, Tsukuba, Ibaraki, Japan | |||
| 11:00 AM | 19.1 | Batch Fabrication of SMA-Actuated Polymer Microvalves | ||
| 11:20 AM | 19.2 | Fabrication of Superelastic Ti-Ni Microtubes by Sputter-Deposition Method | ||
| 11:40 AM | 19.3 | Development of Microactuators Utilizing Ti-Ni-Cu Shape Memory Alloy Thin Film | ||
| 12:00 PM | 19.4 | Shape Memory Thin Films | ||