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Tuesday, September 23, 2008 - 11:45 AM
9.6

Texture development and phase transformation behaviour of sputtered Ni-Ti films

R. M. S. Martins, Forschungszentrum Dresden-Rossendorf, Dresden, Germany; N. Schell, GKSS Research Center Geesthacht, Geesthacht, Germany; R. J. C. Silva, L. Pereira, CENIMAT, Monte de Caparica, Portugal; K. K. Mahesh, F. M. Braz Fernandes, CENIMAT - I3N, Monte de Caparica, Portugal

The technological importance of thin films has led to an unabated interest in the detailed characterization of their structure, morphology, and their interfaces. A real understanding of the underlying growth mechanisms and their microstructural development requires sophisticated in situ techniques. X-ray diffraction with high-brilliance beams is such a powerful technique, as it is demonstrated here for the study of Ni-Ti films.

Numerous examples of investigations on Ni-Ti films can be found in the literature but it has been reported that the deposition of Ni-Ti films with definite stoichiometry and high purity remains a challenge, and important issues like formation of film texture and its control are still unresolved.

It is essential to identify and control their preferential orientation since it is a crucial factor in determining the shape memory behaviour. Widening the scope of our previous experiments concerning the influence of the deposition parameters on the structure of the Ni-Ti films, the incorporation of a TiN buffer layer has been tested.

Here, it is established a clear relationship between the TiN substrates and Ni-Ti texture development (B2 phase) and it is shown that the distinct crystallographic orientations of the Ni-Ti films influence their phase transformation behaviour.

The influence of a substrate bias voltage on the preferential orientation of the B2 phase and transformation temperatures is as well revealed. A lower biaxial stress state and lower phase transformation temperatures have been observed for the films deposited with bias (-45 and -90V). Therefore, the control of the energy of the bombarding ions could be used as a tool for the manipulation of the transformation temperatures.


Summary: It is essential to identify and control the preferential orientation of Ni-Ti films since it is a crucial factor in determining the shape memory behaviour. Widening the scope of our previous experiments concerning the influence of the deposition parameters on the structure of the Ni-Ti films, the incorporation of a TiN buffer layer has been tested. Here, it is established a clear relationship between the TiN substrates and Ni-Ti texture development (B2 phase) and it is shown that the distinct crystallographic orientations of the Ni-Ti films influence their phase transformation behaviour. The influence of a substrate bias voltage on the preferential orientation of the B2 phase and transformation temperatures is as well revealed. A lower biaxial stress state and lower phase transformation temperatures have been observed for the films deposited with bias (-45 and -90V). Therefore, the control of the energy of the bombarding ions could be used as a tool for the manipulation of the transformation temperatures.