Evaluation of Pseudo-Elastic Property of Ni-Ti Bi-Layer Thin Film
Evaluation of Pseudo-Elastic Property of Ni-Ti Bi-Layer Thin Film
Tuesday, May 21, 2013
OREA Pryamida Hotel
There are countless alloys which are known as shape memory alloys (SMAs). Among various SMAs, NiTi-based alloys have received wide attention due to their strong recovery force and large deformation. In the form of thin films, SMAs are being developed for a variety of micro-electromechanical systems (MEMS) applications [1-2].
Previous studies have portended that SMA films with compositional gradients have the added feature of an intrinsic two-way shape memory effect (SME). Multi-layer, composite or functionally graded NiTi based films can be designed for improving the properties of NiTi films. In order to successfully develop functionally graded NiTi thin films for MEMS application, it is essential to characterize, control the changes in composition, thermo-mechanical properties and residual stress in these films [3]. The aim of this research is to design and make a bi-layer thin film with gradient chemical composition. Special attention was paid on the mechanical properties of mono and bi-layers with different chemical compositions.