Evaluation of Pseudo-Elastic Property of Ni-Ti Bi-Layer Thin Film
Previous studies have portended that SMA films with compositional gradients have the added feature of an intrinsic two-way shape memory effect (SME). Multi-layer, composite or functionally graded NiTi based films can be designed for improving the properties of NiTi films. In order to successfully develop functionally graded NiTi thin films for MEMS application, it is essential to characterize, control the changes in composition, thermo-mechanical properties and residual stress in these films . The aim of this research is to design and make a bi-layer thin film with gradient chemical composition. Special attention was paid on the mechanical properties of mono and bi-layers with different chemical compositions.