Ionization cloud formation in rotary cathode plasma confinement

Thursday, May 4, 2017: 12:40 PM
Ballroom BC (Rhode Island Convention Center)
Patrick Morse , Sputtering Components Inc., Owatonna, MN
Visually static ionization clouds have been observed forming within the plasma confinement for rotary cathodes. The magnitudes and frequency of occurrence for these ionization clouds are explored as a function of the process variables through observations and plasma simulations. A governing theory for the creation of the ionization clouds is also presented.