Manipulation and control of spatial ALD layers for flexible devices

A new generation of flexible electronics can benefit from accurate coating control  and material properties and also from combined inorganic/organic coating methods that can be integrated in one system. To serve this purpose, we have developed an innovative system that combines a highly controlled spatial ALD deposition system with a coatings step of a patterned of fully covered organic-based layer.

We will present how roll-to-roll spatial ALD enables production of high performance barrier foil which can be used to protect sensitive flexible electronics like OLEDs, thin film (O)PV and quantum dot foils. We will explain the basics of spatial ALD, the challenges of scaling up to industrial production and present an evaluation of the barrier and optical properties of deposited barriers.

The versatility of the roll-to-roll spatial ALD system is ideal for process and equipment development and represents an important milestone for fabrication of flexible solutions for various industries.  Additional to barrier foils, such a system can also be used to deposit buffer layers and conductive oxides for CIGS, oxide semiconductors for TFT’s or electrode materials for batteries. Moreover, with all processes at atmospheric pressure, we have opened the way to low cost production of flexible materials with advanced functionality.