ITO activation by flash lamp annealing on large areas for cost sensitive industries

Flash lamp annealing is a game-changing technology for cost-sensitive large-area applications. VON ARDENNE has demonstrated “design to cost” concepts: avoiding modular scaling by single lamps spanning the entire substrate width and dedicated electrical supply system for the optimal process window. Typical productivity requirements as well as maintenance cycles for typical large-area applications can be met and the technological advantages, such as substrate-independent treatment of Ag-based lowE coatings have been demonstrated.  

ITO is also a cost-sensitive large-area coating material for transparent contact layers or anti-fogging applications. Conventionally, elevated temperature deposition and/or thermal post treatment are mandatory to meet conductivity and transmission requirements. This substantially increases the equipment and processing costs. The presentation will demonstrate that flash lamp annealing offers a more cost-sensitive alternative, as it enables the “activation” of “cold”-deposited ITO to performance levels even surpassing the values for standard processes. The impact of O₂ partial pressure, film thickness, pulse duration and double exposure will be discussed and correlated to results for elevated temperature deposition and oven treatment. Finally, a cost of ownership comparison underlines the financial benefits.