OCP Broadband built-in fully automatized Broadband Optical Monitor with ultimate characteristics

Tuesday, May 2, 2017
Eugene Khokhlov , Izovac, Minsk, Belarus
Alexander Turban , Izovac, Minsk, Belarus
Artem Artamonov , Izovac, Minsk, Belarus
IZOVAC group specializes in precision thin film optical coatings deposition. Accumulated experience allowed us to create optical monitoring complex with unique parameters to obtain sophisticated multilayer optical stacks. Developed OCP (Optical Coating Provider) Broadband is easily integrated hardware and software solution which provides fully automatic control over all types of deposition of optical coatings for different vacuum equipment in wide optical range with spectral resolution up to 0.3nm. OCP Broadband provides extended control opportunities for different measurement modes. It supports such modes as transmittance, reflectance and direct control on either stationary or rotatable substrate (test glass). Primary deposition process control mode is direct transmission through substrate placed on rotatable substrate holder. Spectrometer measures real coating spectrum throughout the working range after each revolution of substrate holder. Software algorithm analyzes measured spectrum based on the optical design of required coating and computes breakpoint for each layer. Close integration with various PLC and Deposition Controllers of vacuum equipment makes it possible to realize optical deposition process automatically from the beginning to the end. Moreover, to obtain high level quality and manufacturing yield of the desired coating OCP Broadband performs design optimization for all remaining layers and applies changes online if necessary.
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