Rotatable magnetrons for the functional coating market

The presentation will introduce two types of rotating sputter cathodes for the functional coating markets - trade-named GRSV & GRSM. The GRSV is a vertically mounted rotatable magnetron aimed at the metallizing, hard and decorative coating markets. GRSV combines a high power capacity with different levels of magnetic unbalance to control the energy provided to the different coating process. Additionally the magnetic array can be rotated to any position for different stages in the process cycle, such as the target and substrate pre-cleaning stages. GRSM is a ‘drop-in’ style flange plate mounted rotatable magnetron suitable for the display coating markets and the typical ‘in-line’ design of production machines. GRSM has a very high capacity in all respects but only requires 110mm of system space either side of the rotating target. Both the GRSV and M can accommodate target diameters of 75, 90, 100/5, 152+ mm and lengths upto 2 m.