60th Annual Society of Vacuum Coaters Technical Conference (SVC TechCon 2017)
April 29 - May 04, 2017
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Krzysztof Ruda
TRUMPF Huettinger Sp. z o.o.
R&D
Zielonka Poland 05-220
Papers:
Advantages of Waveform Adaptability in Low Frequency PECVD Applications
