60th Annual Society of Vacuum Coaters Technical Conference (SVC TechCon 2017)
April 29 - May 04, 2017
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Christof Kurthen
Applied Materials WEB Coating GmbH
Alzenau Germany 63755
Papers:
High Density HAD Plasma Supported Aluminum Oxide Deposition for Transparent Barriers with Superior Mechanical and Gas Diffusion Properties