60th Annual Society of Vacuum Coaters Technical Conference (SVC TechCon 2017)
April 29 - May 04, 2017
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Feng Pan
Peking University Shenzhen Graduate School
Shenzhen China 518055
Papers:
Self-sputtering initiation in high power impulse magnetron discharge on a hollow-cathodic effect enhanced cylindrical sputtering sources
Excellent adhered thick DLC coatings on high-speed steel deposited by ion-beam-assisted plasma immersion ion implantation & deposition and high-power impulse magnetron sputtering pretreatment