Monday, May 1, 2017: 1:40 PM-3:40 PM
Ballroom BC (Rhode Island Convention Center)
Angus Macleod, Thin Film Center Inc. and Robert Sargent, Viavi Solutions
2:20 PM
Characterization Of Optical Coatings Deposited With A Large-Area Radio Frequency Plasma Ion Source
Craig Anthony Outten, Ph.D., Denton Vacuum, LLC;
Andrew Robert Klumph, Denton Vacuum, LLC;
Ryan Paul Mertzic, Denton Vacuum, LLC;
Karl Michael Williams, Denton Vacuum, LLC;
David Walter Konopka, Denton Vacuum, LLC
3:00 PM
Deposition of low residual stress SiO2 films by Hot-Wire CVD processes with a high rate for optical applications
Volker Sittinger, Fraunhofer-Institute for Surface Engineering and Thin Films;
Markus Hofer, Fraunhofer-Institute for Surface Engineering and Thin Films;
Tino Harig, Fraunhofer-Institute for Surface Engineering and Thin Films;
Madeleine Justianto, Fraunhofer-Institute for Surface Engineering and Thin Films;
Hendrik Thiem, Fraunhofer-Institute for Surface Engineering and Thin Films;
Michael Vergohl, Fraunhofer-Institute for Surface Engineering and Thin Films;
Lothar Schafer, Fraunhofer-Institute for Surface Engineering and Thin Films