Heureka! Session

Tuesday, May 2, 2017: 3:00 PM-5:00 PM
Exhibit Hall (Rhode Island Convention Center)
Hana Barankova, Uppsala University
3:00 PM
2.45 GHz Microwave Plasma Source Arrays for Large Area Deposition, Etch, and Surface Modification
Mr. Robert E. weiss, Malachite Technologies, Inc.; Mr. Alexander D. Welsh, Malachite Technologies, Inc.; Dr. Louis Latrasse, Sairem, SAS; Dr. Marilena Radoiu, Sairem, SAS; Dr. Juslan Lo, Jean-Francois Champollion University; Dr. Philippe Guillot, Jean-Francois Champollion University
3:20 PM
Cylindrical Magnetron Sputtering of Antireflection Coatings on Three Dimensional Substrates
David Glocker, Isoflux Incorporated; John Lanzafame, Isoflux Incorporated; Rob Belan, Kurt J. Lesker Co.; Nick Franzer, Kurt J. Lesker Co.; Sean Armstrong, Kurt J. Lesker Co.
3:40 PM
Mirror Coating at the Large Synoptic Survey Telescope
Mr. Norman Müller, Von Ardenne GmbH; Dr. Andreas Purath, Von Ardenne GmbH
4:00 PM
Performance Of A Radio Frequency Plasma Ion Source
Craig Anthony Outten, Ph.D., Denton Vacuum, LLC; Andrew Robert Klumph, Denton Vacuum, LLC; Karl Williams, Denton Vacuum, LLC; David Walter Konopka, Denton Vacuum, LLC; George D. Papasouliotis, Denton Vacuum, LLC
4:20 PM
Self-sputtering initiation in high power impulse magnetron discharge on a hollow-cathodic effect enhanced cylindrical sputtering sources
Suihan Cui, Peking University Shenzhen Graduate School; Zhongzhen Wu, Peking University Shenzhen Graduate School; Shu Xiao, Peking University Shenzhen Graduate School; Bocong Zheng, Peking University Shenzhen Graduate School; Ricky K Y Fu, City University of Hong Kong; P.K. Chu, City University of Hong Kong; Wenchang Tan, Peking University Shenzhen Graduate School; Feng Pan, Peking University Shenzhen Graduate School
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