Tuesday, May 2, 2017: 3:00 PM-5:00 PM
	Exhibit Hall (Rhode Island Convention Center)
	
	
	
	
	Hana Barankova, Uppsala University	
	
	
	
		
	
	3:00 PM
	
	
		2.45 GHz Microwave Plasma Source Arrays for Large Area Deposition, Etch, and Surface Modification
		
			
				Mr. Robert E. weiss, Malachite Technologies, Inc.; 
			
				Mr. Alexander D. Welsh, Malachite Technologies, Inc.; 
			
				Dr. Louis Latrasse, Sairem, SAS; 
			
				Dr. Marilena Radoiu, Sairem, SAS; 
			
				Dr. Juslan Lo, Jean-Francois Champollion University; 
			
				Dr. Philippe Guillot, Jean-Francois Champollion University
			
		
		
			
		
	 
 
	
	
	
	4:00 PM
	
	
		Performance Of A Radio Frequency Plasma Ion Source
		
			
				Craig Anthony Outten, Ph.D., Denton Vacuum, LLC; 
			
				Andrew Robert Klumph, Denton Vacuum, LLC; 
			
				Karl Williams, Denton Vacuum, LLC; 
			
				David Walter Konopka, Denton Vacuum, LLC; 
			
				George D. Papasouliotis, Denton Vacuum, LLC