Tuesday, May 2, 2017: 3:00 PM-5:00 PM
Exhibit Hall (Rhode Island Convention Center)
Hana Barankova, Uppsala University
3:00 PM
2.45 GHz Microwave Plasma Source Arrays for Large Area Deposition, Etch, and Surface Modification
Mr. Robert E. weiss, Malachite Technologies, Inc.;
Mr. Alexander D. Welsh, Malachite Technologies, Inc.;
Dr. Louis Latrasse, Sairem, SAS;
Dr. Marilena Radoiu, Sairem, SAS;
Dr. Juslan Lo, Jean-Francois Champollion University;
Dr. Philippe Guillot, Jean-Francois Champollion University
4:00 PM
Performance Of A Radio Frequency Plasma Ion Source
Craig Anthony Outten, Ph.D., Denton Vacuum, LLC;
Andrew Robert Klumph, Denton Vacuum, LLC;
Karl Williams, Denton Vacuum, LLC;
David Walter Konopka, Denton Vacuum, LLC;
George D. Papasouliotis, Denton Vacuum, LLC