G. A. Knorovsky, D. O. MacCallum, E. A. Holm, J. R. Michael, Sandia National Laboratories, Albuquerque, NM; V. V. Semak, The Pennsylvania State University, State College, PA; B. M. Nowak-Neely, University of New Mexico, Albuquerque, NM

Summary: We are developing joining tools that work at microscales, (<100micrometers part size, not just thickness). The results demonstrate the feasibility of three approaches, including small spotsize laser welding (including Q-switched lasers), electron beam welding (using an SEM's beam as the heat source) and Focused Ion Beam deposition joining.