C. Petorak, Praxair Electronics, Phoenix, AZ

Summary: Yttria coatings are currently applied on both bare and anodized aluminum surfaces in plasma etch chambers and components to provide increased corrosion and erosion protection. The adhesion of a plasma-sprayed coating is known to be primarily dependent upon: 1) the effluent characteristics; e.g. temperature and velocity of the particles, and 2) the substrate characteristics, e.g. surface roughness, substrate temperature, and presence of adsorbates/condensates. The currently study focuses on the increased challenges in bond strength associated with coating on a smooth anodized aluminum surface, and the significance of the ASTM C633 test method utilized to quantify bond strength.