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| Plasma Sprayed Ceramics in Semiconductor Equipment and Electronics Applications | ||||
| Location: Laughlin III (Flamingo Las Vegas Hotel) | ||||
| (Please check final room assignments on-site). | ||||
| Session Description: | ||||
| Session Chair: | Dr. Hong Shih LAM Research, Fremont, CA | |||
| 10:30 AM | Electrochemical Corrosion Evaluation of Thermal Spray Coatings Used as Environmental Barrier | |||
| 10:50 AM | Influence of Powder Properties and Plasma Spray Conditions on Erosion Resistance of Yttrium Oxide Coatings against Halogen Plasma for Dry Etching Process in Semiconductor and Electronic Applications | |||
| 11:10 AM | Bond Strength and Bond Strength and Interfacial Effects of Plasma-Sprayed Yttria on Anodized Aluminum | |||
| 11:30 AM | Microstructure Evolution and Dielectric Properties of Plasma Sprayed BaTiO3 Coatings | |||
| 11:50 AM | Induction Plasma Spraying of High Purity Materials for the Electronic Industry | |||
| 12:10 PM | Panel Discussion | |||
| 12:30 PM | Lunch | |||