K. H. Baik, Y. M. Kim, Chungnam National University, Daejeon, South Korea; K. S. Park, Dansung Electron, Ansan, South Korea
BaTiO3 coatings are very promising for a wide range application in microelectronics because of their high dielectric constant and low leakage current. In this study, atmospheric plasma spraying has been employed to produce a thick BaTiO3 coating, and microstructural features and dielectric properties of BaTiO3 coatings have been investigated. As-sprayed BaTiO3 coating was mainly composed of amorphous phase from splat quenching of fully molten droplets. Small amounts of crystalline phase also remained due to incorporation of partially-molten droplets. The as-spayed amorphous coating was crystallized to BaTiO3 at low temperatures and a mixture of BaTiO3 and BaTi2O5 at high temperatures. At 1200oC, the coating was formed an equiaxed grain structure due to sintering effects. Dielectric constant of BaTiO3 coatings was rapidly increased from 85 for as-sprayed to 270 for heat-treated at 1200oC. The plasma-sprayed BaTiO3 coatings were discussed for the application of electrostatic chuck.
Summary: BaTiO3 coatings are very promising for a wide range application in microelectronics because of their high dielectric constant and low leakage current. In this study, plasma sprayed BaTiO3 coatings have been investigated in terms of microstructural features and dielectric properties, and discussed for the application of electrostatic chuck.
