In-situ sample preparation and high-resolution SEM-STEM analysis
R. J. Young, FEI Company, Hillsboro, OR; M. P. Bernas, M. V. Moore, J. P. Jordan, FEI Company, Hillsboro, OR; Y. C. Wang, FEI, Hillsboro, OR; R. Schampers, I. van Hees, FEI Company, 5600 KA Eindhoven, Netherlands
